Physical Deposition System Plasma Cleaner For Wafers
Physical Deposition System Plasma Cleaner For Wafers
Model Number:
OLT-PS-5L
Compliance:
CE Certified
Minimum Order Quantity:
1
Capacity:
5L
Voltage:
108V-240V 50/60HZ
Power:
≤200W
Warranty:
3 year
Dimension(L*W*H):
440*450*200mm
Weight:
45 kg
Packaging Details:
Export wooden package
Delivery Time:
8-10 day
Lab Atmospheric Plasma Cleaner For Coating And Surface Treatment
Model | OLT-PS-5L |
Power supply | AC220V |
Working current | Total working current not higher than1.2A (Not include the vacuum pump) |
RF frequency | ≤200W |
RF power | 40KHZ(offset less than 0.2Hz) |
Frequency offset | Less than 0.2KHz |
Impedance matching | 50 Ohm,Automatic matching |
Cleaning capacity | 5L |
Vacuum degree | 10Pa-1000Pa |
Outside dimension | 440*450*200mm |
Gross weight | 17.5Kg |
Vacuum Pump | OLT-4C |
Vacuum chamber temperature | <65ºC |
Cooling type | Forced cooling |
Accessories | host machine 1set, vacuum pump 1set vacuum high pressure pipe 1pc,O type card 4pcs,Fuse(0.2A,1.5A) each 3pcs, manual book |
1. Environmental technologies: plasma process is the role of gas - solid coherent reactor consumes no water resources, no need to add chemicals and no environmental pollution.
2. Wide adaptability: regardless of processing substrate type, such as metals, semiconductors, oxides, and most of the polymer material can be a good deal;
3. Low temperature: close to room temperature, particularly suitable polymer materials, have a longer retention time and a higher surface tension than the corona and flame method.
4. Multifunctions: it involves only a shallow surface of polymer materials (10 -1000A), while preserving the characteristics of the material itself can give it one or more new features;
5. Low cost: the device is simple, easy operation and maintenance, continuous operation,a few bottles of gas can replace thousands of kilograms cleaning fluid
6. The whole process technology can be controlled: all the parameters can be setted by the computer and data recording
7. Treated geometry Unlimited: Big or small, simple or complex, parts or textiles can be processed.
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